Reducing purity of water for outside air conditioners and air washers for humidification for clean room

Kaga Toshiba Electronics Corporation

Kaga Toshiba Electronics focuses on manufacturing power semiconductors, which control current and voltage in particular, among the transistor and diode elements known as discrete semiconductors. A lot of water is used in the manufacturing process.
To maintain suitable temperature and humidity for semiconductor manufacturing inside a clean room, the operation of an air conditioners is essential. Before taking outside air into the air conditioner, the outside air is processed in the outside air conditioner and fed into the air conditioner, thereby reducing the load on the air conditioner and saving energy. Pure water constantly flowing through the air washer* in the outdoor air conditioner to humidify the outdoor air and send it to the air conditioner. The amount of pure water is linked to the humidity in the clean room and optimized, resulting in reducing the amount of water received. (Annual reduction amount: 2,383 m³/year)

• Air washer: A device that removes air contaminants with water and at the same time humidifying the air.