Toshiba AI Technology Catalog

  • Media data analysis

Deep learning defect inspection

Accurately deciede the presence and type of defects based on inspection images.


  • Toshiba achieved highly accurate defect detection by combining a deep learning model that distinguishes complex shapes with weakly supervised learning that is resistant to label noise.
  • Used in the Toshiba Group’s semiconductor manufacturing facilities.

Applications



  • Image inspection at manufacturing sites

Benchmarks, strengths, and track record



  • International Symposium on Semiconductor Manufacturing (ISSM) 2018 Best Paper Award
  • Japanese Society for Artificial Intelligence (JSAI) 2016 Field Innovation Award; Gold Prize
  • Used at Toshiba Group manufacturing bases