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Site-Specific 2D Carrier Profiling Technology and Application to Failure Analysis ZHANG Li / KOIKE Mitsuo / HARA Keiryo With the increasing difficulty of process control accompanying the miniaturization of large-scale integrations (LSIs), demand has been growing in recent years for a measuring technology with nanoscale resolution for two-dimensional (2D) carrier profiling, which is related to the performance of scaled silicon devices. Toshiba has been developing a scanning spreading resistance microscopy (SSRM) technology for 2D carrier profiling with a wide dynamic range of carrier concentration and a high spatial resolution of about 1 nm. We have now developed a site-specific SSRM technology and applied it to the failure analysis of real static random access memory (SRAM) devices. As a result, we have succeeded in directly observing carrier concentration in an ultra-thin device of less than 60 nm in thickness and clarifying a failure mode caused by the manufacturing process as well as its mechanism. We have also achieved significant improvements in the yield rate by optimizing the process parameters such as the impurity doping conditions. This high-spatial-resolution and site-specific SSRM technology is expected to accelerate the development of advanced LSI devices through the application of failure analysis, improvement of reliability, and clarification of failure mechanisms. Diagnosis Method Supporting Extraction of Issues and Estimation of Measures for Supply Chain Management YOSHIDA Satoshi / OHSHIMA Hiroko With the development of emerging markets and the diversification of existing market needs in recent years, reconstruction of global supply chain management (SCM) is required to supply products to each market in a timely manner and at lower cost. In particular, accompanying the increase in the number of sales, manufacturing, and procurement sites and the complexity of their relationships, there is a strong necessity for improvements in the extraction of issues and the estimation of measures for SCM in order to determine policies more efficiently. As a solution to this issue, Toshiba has developed a diagnosis method for SCM consisting of two main tools: a SCM Function Level List that makes it possible to clarify the gap between the goal (TO-BE) and actual status (AS-IS) of SCM and identify improvements more easily, and a Simple Inventory Simulator that allows users to quantitatively compare the effects of proposed solutions. Redundant I/O Module for nv Series Unified Controller KURIMOTO Takeshi / KODERA Shigehito / YAMAGUCHI Yasuharu Toshiba has developed a new input/output (I/O) module with a redundant configuration for the nv series unified controller, which is used in various fields including general industrial infrastructure, social infrastructure, and electric power plants. Long-term continuous operation of the new I/O module is ensured by its enhanced reliability, robustness, and maintainability. Furthermore, it offers easy configuration and renewal engineering for migration from the existing CIEMACTM series to the nv series unified controller and system updating to the latest controller. Commercial Operation of Nam Ngum 2 Hydroelectric Power Station in Laos TOMITA Yoshitaka / TEZUKA Kotaro / OKUBO Masashi The Nam Ngum 2 Hydroelectric Power Station of the Nam Ngum 2 Power Company Ltd., located about 100 km north of Vientiane, the capital of the Lao People's Democratic Republic, successfully started commercial operation in December 2010. The CH. Karnchang Public Company Ltd., the prime contractor for this project providing engineering, procurement, and construction (EPC) services, awarded Toshiba a contract for the main generating equipment in August 2006. We have carried out the design, manufacturing, installation, and testing of the main equipment for the power station including turbines, generators, and a supervisory control and data acquisition (SCADA) system, as well as the electrical equipment. The Nam Ngum 2 Hydroelectric Power Station is expected to serve as a power supply base for the Kingdom of Thailand. D4-S Series Protection Relay Realizing High Cost Performance HANZAWA Koji / SUGIURA Hideaki / FUKUSHIMA Kazuto Protection relays are key devices that maintain the stable operation of an electric power system by detecting faults such as lightning faults that occur in the system, including transmission lines and substation facilities, within several tens of milliseconds and issuing a trip command to a circuit breaker in order to isolate the faulty part. Toshiba has been continuously developing protection relays since launching the D1 series as the world's first microprocessor-based digital protection relay in 1980, and recently released the D4 series fourth-generation protection relay in 2007. Based on the design concept and technologies acquired through the development of the D4 series, we have now developed the D4-S series protection relay for high-voltage (HV) and low-voltage (LV) power networks. The D4-S series offers long-term supply and operation as well as high reliability and high cost performance due to its simple configuration with limited expandability. Advanced Auxiliary Power Unit and Application to MUE-Train KIKKAWA Kenichi / OTANI Hiroaki The recent increase in awareness of global environmental issues has led to growing demand for high reliability, energy saving, and ease of maintenance in the railway transportation field. Improved environmental performance of auxiliary power units (APUs) for rolling stock is also required, such as further reduction of the environmental load. Toshiba has developed an advanced APU in response to this situation. This APU achieves a higher efficiency of 96% compared with the 94% efficiency of conventional APUs, through the adoption of a three-level inverter system instead of the conventional two-level type and the application of low-loss insulated gate bipolar transistors (IGBTs). It also achieves a 23% reduction in weight compared with conventional models of the same capacity, through the use of leakage transformers as isolation transformers to eliminate the need for AC reactors. We provided the advanced APU with the rated output capacity of 260 kVA for the multipurpose experimental train (MUE-Train) for conventional railway lines of East Japan Railway Company. Laser Welding Technologies for Realization of Long Lifetime and High Reliability of SCiBTM Infrastructure Battery OKADA Naotada Through the application of laser welding technology to shield the aluminum-alloy bodies of the battery cells, the SCiBTM infrastructure battery developed by Toshiba achieves light weight, long lifetime, and high reliability. However, the welding of aluminum alloy using conventional pulsed lasers generally tends to be unstable and a cause of welding defects including cracks. As a solution to this issue, we have developed a laser welding technology applying a pulse laser with a shaped-pulse waveform to obtain stable welding without defects. We are now developing a welding technology for larger batteries using a high-power continuous-wave (CW) laser to increase the welding speed. |